PRODUCT INFORMATION
M-PAK SERIES

Modular Design Based on Semiconductor Fab Needs

Proven System Reliability
>40,000 MTBF
>800 TCS's in the Field
CE Mark
SEMI S2/2000
Non-CFC, meets Kyoto Protocol

Wide Application Range
-70ºc to >+ 200ºc. Temperature Range
1->20 GPM • 4->80LPM

Small Footprint
Multi Channel

Flexible Design for Universal Application
(Air Cooled and Water Cooled)

Simple Fill/Drain: Offers Both Pressurized or Atmospheric System Pressure as Desired

System Compatible with:
Galden®
Flourinert™
DI/EG

PLC Control for Better Accuracy

Touch Panel Control Screen for Easier Operation

Communication System Flexibility
Analog
Serial
Device Net
Modbus
Custom Interfaces Available

Modular Concept Improves Servicing

Field Replacement Allowable